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Etching

Instrument

Chemical Bench ("DAE Bench") @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Chemical bench (Prefurnace Clean) @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Freeze-etch system @ Freeze-Fracture Transmission Electron Microscopy @ Liquid Crystal Materials Research Center
III-V Reactive Ion Etcher @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Intlvac Nanoquest-I Ion Beam Etching and Milling System @ Nanofabrication and Clean-Room @ UNL Materials Research Science and Engineering Center
March Reactive Ion Etcher @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Micro/Nano Fabrication and Cleanroom @ Materials Research Laboratory Central Research Facilities @ Illinois MRSEC
Minilock Phantom ICP RIE by Trion Technology @ NanoSystems Laboratory (NSL) @ Center for Emergent Materials
Oxford @ Minnesota Nano Center (MNC) @ UMN Materials Research Science and Engineering Center
Oxide/Nitride/Polymer Reactive Ion Etcher @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Piranha Bench @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Plasma Asher @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Plasma Asher & Stripper @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Plasma Etch PS-100LF @ Materials Preparation and Measurement Laboratory (MPML) @ Chicago Materials Research Center
Plasma Etching - Trion (Chlorine-chemistry) RIE Tools @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Plasma Therm Apex SLR ICP plasma etching system @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Plasmatherm RIE/PECVD System (Fluorine-chemistry) @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Silicon Deep Reactive Ion Etcher @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Silicon Deep RIE @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Silicon Wet Etch Bench @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
STS Etcher @ Minnesota Nano Center (MNC) @ UMN Materials Research Science and Engineering Center
Xenon di-fluoride e1-series etching system @ Minnesota Nano Center (MNC) @ UMN Materials Research Science and Engineering Center

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