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Furnaces

Instrument

Air Furnaces @ Materials Cluster @ Cornell Center for Materials Research
Annealing Furnace @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Auxiliary Equipment @ The Soft Materials Characterization Laboratory (SMCL) at the University of Wisconsin-Madison @ Wisconsin MRSEC
Controlled Atmosphere Furnaces @ Materials Cluster @ Cornell Center for Materials Research
Dopant Furnace @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Dry Oxidation @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
High Temperature Anneal N-type doping @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
High Vacuum Furnaces @ Materials Cluster @ Cornell Center for Materials Research
Hydrogen anneal @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Lindberg/Blue Oven @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Lindberg/Blue Tri-Arc Furnace @ Fabrication and Processing @ Materials Research Science Engineering Center
Low Temp Anneal and High Temp Anneal for P-type doping @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Mellen S5-211-3 Tube Furnace @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
Micro/Nano Fabrication and Cleanroom @ Materials Research Laboratory Central Research Facilities @ Illinois MRSEC
Quartz Tube Furnaces @ Materials Preparation and Measurement Laboratory (MPML) @ Chicago Materials Research Center
Rapid Thermal Anneal System @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Tubular Furnaces (up to 1500 C) @ Fabrication and Processing @ Materials Research Science Engineering Center
ULVAC-RIKO MILA-5000 Rapid Thermal Processor @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Wet and Dry Oxide Furnace @ Central Facility for Microelectronics @ Center for Advanced Materials Research

People

Jerry Hunter @ Wisconsin MRSEC