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Lithography

Instrument

Auxiliary Equipment @ The Soft Materials Characterization Laboratory (SMCL) at the University of Wisconsin-Madison @ Wisconsin MRSEC
Cee Model 100 Photoresist Spinner @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Dip-pen Nanolithography @ SCSU (Southern Connecticut State University) @ CRISP: Center for Research on Interface Structures and Phenomena
E-Beam Lithography System @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Electron Beam Lithography System (EBL) @ Nanofabrication and Clean-Room @ UNL Materials Research Science and Engineering Center
Electron-Beam Lithography @ Fabrication and Processing @ Materials Research Science Engineering Center
Elionix ELS-G100 Electron Beam Lithography System @ The Nanoscale Fabrication Center (NFC) @ Wisconsin MRSEC
Frontside/Backside Mask Aligner @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Heidelberg DWL 66+ laser writer lithography system @ The Nanoscale Fabrication Center (NFC) @ Wisconsin MRSEC
Heidelberg uPG101 900nm, 1um, 5um @ UtahNanofab @ Next Generation Materials for Plasmonics and Organic Spintronics
Karl Suss Contact Mask Aligner @ Minnesota Nano Center (MNC) @ UMN Materials Research Science and Engineering Center
Karl Suss MJB-3 Mask Aligner @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Leica/Vistec EBPG 5000 Field-Emission Electron Beam Pattern Generator
Mask Aligner @ Fabrication and Processing @ Materials Research Science Engineering Center
Mask Aligner @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Micro/Nano Fabrication and Cleanroom @ Materials Research Laboratory Central Research Facilities @ Illinois MRSEC
Optical Lithography
Polymer-Pen Lithography with XE Series AFM @ Molecular Design Institute @ NYU Materials Research Science and Engineering Center
Projection Photolithography @ Fabrication and Processing @ Materials Research Science Engineering Center
Specialty Coating Systems Spincoater P6700 @ Materials Preparation and Measurement Laboratory (MPML) @ Chicago Materials Research Center
UV Exposure System @ Materials Preparation and Measurement Laboratory (MPML) @ Chicago Materials Research Center
Vistec EBPG 5000+ electron-beam lithography @ Imaging and Characterization Facility @ CRISP: Center for Research on Interface Structures and Phenomena
Vistec EBPG5000+ @ Minnesota Nano Center (MNC) @ UMN Materials Research Science and Engineering Center
Wet Chemistry Hoods @ Central Facility for Microelectronics @ Center for Advanced Materials Research

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